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预计2015年轻质复合材市场为9兆元（韩币），透明电极市场为6兆6仟亿元（韩币）等，形成总数为预计32兆元（韩币）的市场的新素材 Graphene. 在韩国及亚洲正用SNTEK的设备来积极研究Graphene的相关研究。请考核在Graphene商业化，大面积化的研究上已达到最佳化的SNTEK的设备 |
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| Concept |
LoadLock > Transfer > Pre Cleaning(O2,Ar) > Surface cleaning
> Sputter(Ni,Cu) > ICP-CVD (Graphene) |
| Specification |
Substrate Size : Max. 200mm x 200mm
Transfer Chamber : Hexagonal Chamber with Robot Arm(Cassette)
Load Lock : Glass Loading / Unloading chamber
Pre Cleaning : Plasma Cleaning Process Chamber
Sputter : Metal Layer Process Chamber(Ni,Cu)
ICP-CVD : Graphene CVD Process Chamber
PLC & PC Control
Automation Control with Process Recipe
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